General
Open (active)
FA860126Q0075
Jul 02, 2026 03:00 PM
Jun 16, 2026 02:10 PM
10 years
Small Business
Sources Sought
Federal
Original Solicitation Links
[

FA860126Q0075

]

plasma pro 100

Contacts
Candice Snow

Brian Algeo
Submission Instructions
Email
Description

The Department of the Air Force, Air Force Materiel Command, Air Force Life Cycle Management Center (AFLCMC) is seeking sources for the purchase, installation, setup, testing, and training of an Oxford PlasmaPro 100 Reactive Ion Etch (RIE) system. This system, along with associated support equipment such as chillers and vacuum systems, will be located in the Engineering Laboratory at the Air Force Institute of Technology (AFIT) at Wright-Patterson AFB, OH. The required period of performance is 120 days after contract award. Key components include the PlasmaPro 100 ICP Etch system with specific power and supply configurations, a Cobra300 3kW ICP plasma etch source, a cryo-cooled/electrically-heated etch lower electrode kit, a complete gas delivery system, and associated vacuum pumps, chillers, and control hardware. The contractor will be responsible for ensuring all supporting equipment and processes are functional in accordance with manufacturer recommendations and standard commercial practices. This includes providing a system manual, packaging, and crating. The government is also interested in understanding vendor capabilities, including their socio-economic status, manufacturer or distributor status, past performance on similar projects, and commercial sales history. Small businesses are encouraged to respond, with consideration for a potential small business set-aside, contingent on demonstrated capability and compliance with subcontracting limitations.

Classification Codes
NAICS811310Commercial and Industrial Machinery and Equipment (except Automotive and Electronic) Repair and Maintenance
PSCJ066Maintenance, Repair and Rebuilding of Equipment: Instruments and Laboratory Equipment
Smart Codes
rie system installationplasma etch system traininglaboratory equipment maintenance
Specifications
Supply & Service
Requirements
Required
Documents
TitleDate Posted
Instructions to Offerors.pdfJun 16, 2026 12:00 PM
01. SOW _OXFORD Plasma Pro 100 RIE _ 20260611.pdfJun 16, 2026 12:00 PM
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