Rapid Thermal Process System and Accessories
University of Missouri System
Original Solicitation Links
Request for Bid-27-0019
]rapid thermal process system
27-0019
]rapid thermal process system
Contact
Submission Instructions
Description
The University of Missouri is seeking one rapid thermal process system and accessories for hands-on microfabrication training in undergraduate semiconductor engineering courses. The system must process substrates ranging from 1 cm × 1 cm pieces through six-inch wafers; support manual loading; provide mass-flow-controller-controlled nitrogen, argon, and forming-gas lines; reach 1,200°C; maintain maximum temperature for up to five minutes; provide programmable heating and cooling ramp rates of 100°C per second; include temperature measurement and control; and include a recirculating chiller. Respondents must provide detailed equipment literature and, where applicable, literature for software/hardware, installation, and maintenance services. The response also requires a completed Higher Education Community Vendor Assessment Toolkit (HECVAT) version 4.0 or higher, a completed IdP Questionnaire, and applicable authentication integration documentation. Additional security documentation, such as a recent SOC 2 Type 2 report, vulnerability assessment or penetration-test report, ISO 27001 certification, HITRUST certification, HIPAA certification, PCI compliance documentation, security white papers, technical documents, certifications, or policies, may be required. The contract term is one year from the date of award.
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