Plasma-Enhanced Chemical Vapor Deposition System
University of Missouri System
Original Solicitation Links
Request for Bid-27-0038
]plasma enhanced chemical vapor deposition (pecvd) system
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Description
The University of Missouri is soliciting bids for one plasma-enhanced chemical vapor deposition (PECVD) system for hands-on semiconductor microfabrication training. The system must process substrates from 1 cm × 1 cm pieces through six-inch wafers; deposit silicon dioxide and silicon nitride films; include temperature-controlled substrate and upper-electrode systems, a chiller, reactor-body heating, 300 W RF and low-frequency generators, a corrosive-gas-resistant dry foreline pump and turbomolecular pump, five mass-flow-controller process-gas lines with gas pods, and endpoint detection. The system must operate at 208 VAC and include a 24-month warranty. Respondents must provide detailed product literature and pricing for the PECVD system. Separate bid lines request pricing, if applicable, for software/hardware, maintenance or service, training, installation, shipping/freight, and discounts; service terms and included services must be described where offered. The awarded supplier will provide the equipment under a two-year contract term, with pricing firm during the initial term. The solicitation also requires acknowledgment of the university's terms, instructions, specifications, and insurance requirements if awarded.
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