Tabletop Maskless Aligner System
United States of America > ENERGY, DEPARTMENT OF > SLAC Natl Accel Lab -DOE Contractor
Original Solicitation Links
SLAC_368016_TabletopMasklessAlignerSystem
]tabletop maskless aligner system
Contacts
Submission Instructions
Description
SLAC National Accelerator Laboratory is seeking one tabletop maskless aligner system mounted on an anti-vibration table suitable for cleanroom installation. The system must provide raster and stitching-free exposure modes for broadband and special i-line photoresists; a minimum feature size of 0.6 micrometers; minimum lines and spaces of 0.8 micrometers; CD uniformity of 0.2 micrometers at 3σ; 256-level grayscale; overlay or second-layer alignment accuracy of 1 micrometer over a 50-by-50-millimeter area; draw-mode functionality; real-time autofocus with optical focusing; and a vacuum chuck supporting substrates from 5-by-5 millimeters through 6 inches and 0.1-to-10-millimeter thicknesses. Native GDSII, DXF, CIF, and BMP support is required. The quotation must include price and lead time, with delivery within no more than six months. Installation, training, and U.S.-based or local service support, including a service-contract option, are required. Selection will use a lowest-price technically acceptable method. The resulting purchase order will be fixed price, with FOB destination prepaid and add freight terms and net-30 payment terms. The response must include HTS and ECCN information if applicable, identify proprietary or confidential information, and address the required Buy American Act certification when the unit price is $15,000 or more.
Classification Codes
Smart Codes
Specifications
Timeline
Requirements
- Business Automobile Liability — $1,000,000.00
- Commercial General Liability
- Workers' Compensation — $1,000,000.00
Documents
| Title | Date Posted |
|---|---|
| F2_SubcontractorFormIIPP_Injury_Illness_Prevention_Plan_Acknowledgement_Form (Onsite).pdf | Sep 02, 2026 12:00 PM |
| 01. BAA_Certification_08.29.2023_(D5) (1).pdf | Sep 02, 2026 12:00 PM |
| E1_Non-Green_On_Site_Services_Rider_(January_2025).pdf | Sep 02, 2026 12:00 PM |
| SLAC General Terms and Conditions Supplemental Rider Rev August 2026.pdf | Sep 02, 2026 12:00 PM |
| F2_Certificate_of_Liability_Insurance_(Example)(Onsite).pdf | Sep 02, 2026 12:00 PM |
| Fixed_Price_Commercial_Supplies_and_Services_Subcontract_Aug2023.pdf | Sep 02, 2026 12:00 PM |
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