Gas Abatement System
United States of America > COMMERCE, DEPARTMENT OF > NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY > DEPT OF COMMERCE NIST
Original Solicitation Links
1333ND26QNB030563
]solicitation for gas abatement system
Contact
Submission Instructions
Description
The National Institute of Standards and Technology seeks one new, commercially available gas abatement system for hazardous exhaust from a semiconductor plasma-etch chamber. The system must use a dry-bed absorber/scrubber in a cabinet with exterior controls, endpoint detection, continuous monitoring, canister bypass and field replacement capability, negative-pressure operation, specified vacuum and utility connections, and operation on single-phase 100-125 V power at 18 amps or less. Used, remanufactured, experimental, prototype, custom, and gray-market equipment will not be considered. The system must abate F-containing reaction by-products, including HF, and all compounds to be abated must be treated in the same canister. The listed gas flow rates are individual maximums rather than simultaneous maximums; vacuum-pump ballast will not exceed 50 sccm. A dry scrubber is required, while burn/wet or plasma/wet systems are not necessary, and the system is not required to abate CF4, CHF3, C2F6, or SF6 themselves. The quotation must demonstrate compliance with every Statement of Work requirement through technical descriptions or product-literature citations and include firm-fixed pricing for the system, shipping and handling, and applicable transportation or tariff costs. Delivery is required 12 weeks after receipt of order, with installation documentation due at award and onsite training for up to five users within 90 days after installation. The system includes a minimum 12-month warranty beginning upon Government acceptance. Award will be made to the lowest-priced technically acceptable quoter.
Classification Codes
Smart Codes
Specifications
Timeline
Documents
| Title | Date Posted |
|---|---|
| 1333ND26QNB030563.pdf | Aug 28, 2026 12:00 PM |
| Solicitation Q and A 9-9-26.docx | Sep 09, 2026 12:00 PM |
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