MLA 150 Maskless Aligner System
University of Calgary
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Description
The University of Calgary's qLab intends to purchase an MLA 150 maskless aligner system for multi-user semiconductor cleanroom operations and quantum-device fabrication on substrates including transparent materials and diamond. Required capabilities include maskless lithography, a minimum feature size of 1 mm, dual 405 nm and 375 nm laser wavelengths, real-time autofocus for transparent, patterned, warped, or delicate substrates, and sufficient cleanroom throughput. The notice identifies Spectra Research Corporation as the sole authorized Canadian representative of Heidelberg Instruments for this system and states that the MLA 150 is the only known system meeting the required functional and technical capabilities. This is an Advance Contract Award Notice indicating the buyer's intent to proceed with that vendor unless a valid challenge is submitted.
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